Publication:
HfO2/spacer-interface breakdown in HfO2 high-k/poly-silicon gate stacks
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1998 since deposited on 2021-10-16
2last month
Acq. date: 2026-02-26
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Statistics
Views
1998 since deposited on 2021-10-16
2last month
Acq. date: 2026-02-26
Citations