Authors

Caymax, Matty; Vescan, L.; Werner, K.; Bensahel, D.; Gravensteijn, D.; Szendro, I.

Conference

Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

Title

Low thermal budget Si epitaxy: an overview study of the substrate/epi interface in a number of common epitaxial growth systems

Publication type

Proceedings paper

Embargo date

9999-12-31