Authors

Rudenko, Tamara; Collaert, Nadine; De Gendt, Stefan; Kilchytska, V.; Jurczak, Gosia; Flandre, Denis

Journal

Microelectronic Engineering

Volume

80

Title

Effective mobility in FinFET structures with HfO2 and SiON gate dielectrics and TaN gate electrode

Publication type

Journal article