Publication:
Mechanism of positive-bias temperature instability in sub-1 nm TaN/HfN/HfO2 gate stack with low preexisting traps
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1944 since deposited on 2021-10-16
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Acq. date: 2025-12-09
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1944 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2025-12-09
Citations