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Mechanism of positive-bias temperature instability in sub-1 nm TaN/HfN/HfO2 gate stack with low preexisting traps

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1948 since deposited on 2021-10-16
3last month
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Acq. date: 2026-04-30

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1948 since deposited on 2021-10-16
3last month
2last week
Acq. date: 2026-04-30

Citations