Authors

Satta, Alessandra; Janssens, Tom; Clarysse, Trudo; Simoen, Eddy; Meuris, Marc; Benedetti, Alessandro; Hoflijk, Ilse; De Jaeger, Brice; Demeurisse, Caroline; Vandervorst, Wilfried

Conference

USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors

Title

P implantation on doping of Ge: diffusion, activation, re-crystallization

Publication type

Proceedings paper