Publication:

P implantation on doping of Ge: diffusion, activation, re-crystallization

Date

2005

Proceedings Paper

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Author(s)

Satta, Alessandra

;

;

Clarysse, Trudo

;

;

;

Benedetti, Alessandro

;

;

De Jaeger, Brice

;

Demeurisse, Caroline

;

Vandervorst, Wilfried

Statistics

2071 since deposited on 2021-10-16

Acq. date: 2026-02-26