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Optimization of low-temperature silicon nitride processes for improvement of device performance
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Authors
Sleeckx, Erik
;
Schaekers, Marc
;
Shi, Xiaoping
;
Kunnen, Eddy
;
Degroote, Bart
;
Jurczak, Gosia
;
de Potter de ten Broeck, Muriel
;
Augendre, Emmanuel
Issue
5_6
Journal
Microelectronics Reliability
Volume
45
Title
Optimization of low-temperature silicon nitride processes for improvement of device performance
Publication type
Journal article
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