Publication:

A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates

Date

2005-10
Journal article
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Author(s)

Travaly, Youssef
;
Schuhmacher, Jorg
;
Baklanov, Mikhaïl
;
Giangrandi, Simone
;
Richard, Olivier  
;
Brijs, Bert
;
Van Hove, Marleen
;
Maex, Karen  
;
Abell, Thomas
;
Somers, K.R.F
;
Hendrickx, M.F.A
;
Vanquickenborne, L.G.
;
Ceulemans, A.
;
Jonas, A.M

Journal

Journal of Applied Physics

Abstract

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1957 since deposited on 2021-10-16
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1957 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-07

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