Publication:
Applying design-based metrology for calibrating an OPC model for FinFET pattering
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2002 since deposited on 2021-10-16
3last month
Acq. date: 2026-01-09
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Metrics
Views
2002 since deposited on 2021-10-16
3last month
Acq. date: 2026-01-09
Citations