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Demonstration of recessed SiGe S/D and inserted metal gate on HfO2 for high performance pFETs

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1937 since deposited on 2021-10-16
1last month
Acq. date: 2026-03-17

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Views

1937 since deposited on 2021-10-16
1last month
Acq. date: 2026-03-17

Citations