Authors

Verheyen, Peter; Eneman, Geert; Rooyackers, Rita; Loo, Roger; Eeckhout, Lieve; Rondas, Dirk; Leys, Frederik; Snow, Jim; Shamiryan, Denis; Demand, Marc; Hoffmann, Thomas Y.; Goodwin, Michael; Fujimoto, Hiromasa; Ravit, Claire; Lee, Byeong Chan; Caymax, Matty; De Meyer, Kristin; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge

Conference

Technical Digest International Electron Devices Meeting (IEDM)

Title

Demonstration of recessed SiGe S/D and inserted metal gate on HfO2 for high performance pFETs

Publication type

Proceedings paper