Authors

Zhao, Chao; Heeg, T.; Wagner, M.; Schubert, J.; Witters, Thomas; Brijs, Bert; Bender, Hugo; Richard, Olivier; Afanasiev, Valeri; Houssa, Michel; Caymax, Matty; De Gendt, Stefan

Conference

Meeting Abstracts 208th Electrochemical Society Meeting: 3rd International Symposium on High Dielectric Constant Gate Stacks

Title

Rare-earth metal scandate high-k layers: promises and problems

Publication type

Meeting abstract