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Nitrogen incorporation in HfSiO(N)/TaN gate stacks: impact on performances and NBTI
Publication:
Nitrogen incorporation in HfSiO(N)/TaN gate stacks: impact on performances and NBTI
Date
2007
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Aoulaiche, Marc
;
Houssa, Michel
;
Deweerd, Wim
;
Trojman, Lionel
;
Conard, Thierry
;
Maes, Jan
;
De Gendt, Stefan
;
Groeseneken, Guido
;
Heyns, Marc
Journal
IEEE Electron Device Letters
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1939
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1939
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations