Superior N- and PMOSFET scalability using carbon co-implantation and spike annealing

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Authors

Augendre, E.; Pawlak, Bartek; Kubicek, Stefan; Hoffmann, Thomas; Chiarella, Thomas; Kerner, Christoph; Severi, Simone; Falepin, Annelies; Ramos, Emilio; De Keersgieter, An; Eyben, Pierre; Vanhaeren, Danielle; Vandervorst, Wilfried; Jurczak, Gosia; Absil, Philippe; Biesemans, Serge

Issue

11_12

Journal

Solid-State Electronics

Volume

51

Title

Superior N- and PMOSFET scalability using carbon co-implantation and spike annealing

Publication type

Journal article

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