Publication:

Superior N- and PMOSFET scalability using carbon co-implantation and spike annealing

Date

2007

Journal article

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Author(s)

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Kubicek, Stefan

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Hoffmann, Thomas

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Chiarella, Thomas

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Kerner, Christoph

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Falepin, Annelies

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De Keersgieter, An

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Vanhaeren, Danielle

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Vandervorst, Wilfried

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Absil, Philippe

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Biesemans, Serge

Journal

Solid-State Electronics

Metrics

2023 since deposited on 2021-10-16

Acq. date: 2025-12-12