Authors

Bargallo Gonzalez, Mireia; Chowdhury, Mohammad Kamruzzaman; Bhouri, Nada; Verheyen, Peter; Leys, Frederik; Richard, Olivier; Loo, Roger; Claeys, Cor; Simoen, Eddy; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.G.; Lu, J.P.; Weijtmans, J.W.; Wise, R.

Conference

Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS 3: New Materials, Processes and Equipment

Title

Relaxation induced excess leakage current in recessed Si1-xGex source/drain junctions

Publication type

Proceedings paper

Embargo date

9999-12-31