Authors

Bargallo Gonzalez, Mireia; Simoen, Eddy; Vissouvanadin Soubaretty, Bertrand; Thomas, Nicole; Taleb, Nadjib; Verheyen, Peter; Hikavyy, Andriy; Leys, Frederik; Richard, Olivier; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.G.; Lu, J.P; Wise, R.

Conference

Workshop on Semiconductor Advances for Future Electronics and Sensors - SAFE

Title

Impact of the Ge content and the epitaxial thickness on the bandgap shrinkage induced leakage current of recessed Si1-xGex source/drain junctions

Publication type

Proceedings paper

Embargo date

9999-12-31