Publication:
A Dy2O3-capped HfO2 dielectric and TaCx-based metals enabling low-Vt single-metal-single-dielectric gate stack
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1993 since deposited on 2021-10-16
3last month
2last week
Acq. date: 2026-01-09
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Views
1993 since deposited on 2021-10-16
3last month
2last week
Acq. date: 2026-01-09
Citations