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AlGaN/GaN HEMT grown on large size silicon substrates by MOVPE capped with in-situ deposited Si3N4
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Authors
Cheng, Kai
;
Leys, Maarten
;
Derluyn, Joff
;
Degroote, Stefan
;
Xiao, Dongping
;
Lorenz, Anne
;
Boeykens, Steven
;
Germain, Marianne
;
Borghs, Gustaaf
Journal
Journal of Crystal Growth
Volume
298
Title
AlGaN/GaN HEMT grown on large size silicon substrates by MOVPE capped with in-situ deposited Si3N4
Publication type
Journal article
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