Authors

Claeys, Cor; Eneman, Geert; Bargallo Gonzalez, Mireia; Put, Sofie; Simoen, Eddy

Conference

Int. Conf. on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT)

Title

Electrical performance and reliability aspects of strain engineered deep submicron CMOS technologies

Publication type

Proceedings paper

Embargo date

9999-12-31