Authors

Clarysse, Trudo; Eyben, Pierre; Parmentier, Brigitte; Van Daele, Benny; Satta, Alessandra; Vandervorst, Wilfried; Lin, Rong; Petersen, Dirch; Folmer Nielsen, Peter

Conference

International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling

Title

Advanced carrier depth profiling on Si and Ge with M4PP

Publication type

Proceedings paper