Authors

Collaert, Nadine; Rooyackers, Rita; Hikavyy, Andriy; Dixit, Abhisek; Leys, Frederik; Verheyen, Peter; Loo, Roger; Jurczak, Gosia; Biesemans, Serge

Conference

Book of Abstracts 5th Int. Conf. Silicon Epitaxy and Heterostructures - ICSI-5

Title

Multi-gate devices for the 32nm technology node and beyond: challenges for selective epitaxial growth

Publication type

Meeting abstract