Spacer defined FinFET: Active area patterning of sub-20 nm fins with high density

Degroote, Bart; Rooyackers, Rita; Vandeweyer, Tom; Collaert, Nadine; Boullart, Werner; Kunnen, Eddy; Shamiryan, Denis; Wouters, J.; Van Puymbroeck, Jan; Dixit, Abhisek; Jurczak, Gosia

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Spacer defined FinFET: Active area patterning of sub-20 nm fins with high density

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2007

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Microelectronic Engineering

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Spacer defined FinFET: Active area patterning of sub-20 nm fins with high density

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