Publication:

Spacer defined FinFET: Active area patterning of sub-20 nm fins with high density

Date

2007

Journal article

Simple item page Full metadata Statistics

Files

16222.pdf 1.2 MB

Author(s)

;

Rooyackers, Rita

;

Vandeweyer, Tom

;

Collaert, Nadine

;

Boullart, Werner

;

;

Shamiryan, Denis

;

;

Van Puymbroeck, Jan

;

;

Journal

Microelectronic Engineering

Statistics

1880 since deposited on 2021-10-16

Acq. date: 2026-06-12