Publication:
Dry etch of Yb-doped poly-Si gates for low Vt FUSI devices
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1987 since deposited on 2021-10-16
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Acq. date: 2026-08-04
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Statistics
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1987 since deposited on 2021-10-16
2last month
2last week
Acq. date: 2026-08-04
Citations