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Aqueous chemical solution deposition of ultrathin high-k dielectric metal oxide films
Publication:
Aqueous chemical solution deposition of ultrathin high-k dielectric metal oxide films
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Date
2007
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hardy, An
;
Van Elshocht, Sven
;
Van Bael, Marlies
;
D'Haen, Jan
;
Douheret, O.
;
De Gendt, Stefan
;
Adelmann, Christoph
;
Caymax, Matty
;
Conard, Thierry
;
Witters, Thomas
;
D'Olieslaeger, Marc
;
Heyns, Marc
;
Mullens, J.
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Views
1923
since deposited on 2021-10-16
1
last month
1
last week
Acq. date: 2025-12-10
Citations