Aqueous chemical solution deposition of ultrathin high-k dielectric metal oxide films

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Authors
Hardy, An; Van Elshocht, Sven; Van Bael, Marlies; D'Haen, Jan; Douheret, O.; De Gendt, Stefan; Adelmann, Christoph; Caymax, Matty; Conard, Thierry; Witters, Thomas; D'Olieslaeger, Marc; Heyns, Marc; Mullens, J.
Conference
International Symposium on Integrated Ferroelectrics - ISIF
Title
Aqueous chemical solution deposition of ultrathin high-k dielectric metal oxide films
Publication type
Proceedings paper
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