Authors

Le, Quoc Toan; Chiodarelli, Nicolo; Blum, Ivan; Kesters, Els; Lux, Marcel; Claes, Martine; Vereecke, Guy; Mertens, Paul

Conference

Surface Preparation and Cleaning Conference

Title

Cleaning of post-etch photoresist layer on patterned surface using organic solvent combined with physical forces

Publication type

Proceedings paper