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Schottky barrier height lowering by an increase of the substrate doping in PtSi Schottky barrier source/drain FETs
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Authors
Lousberg, Gregory
;
Yu, HongYu
;
Froment, Benoit
;
Augendre, Emmanuel
;
De Keersgieter, An
;
Lauwers, Anne
;
Li, M.F.
;
Absil, Philippe
;
Jurczak, Gosia
;
Biesemans, Serge
Issue
2
Journal
IEEE Electron Device Letters
Volume
28
Title
Schottky barrier height lowering by an increase of the substrate doping in PtSi Schottky barrier source/drain FETs
Publication type
Journal article
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