Authors

Machkaoutsan, Vladimir; Verheyen, Peter; Tomasini, P.; Eneman, Geert; Loo, Roger; Absil, Philippe; Thomas, S.G.; Lu, Jiong Ping; Weijtmans, J.W.; Wise, R.

Conference

International Conference on Solid State Devices and Materials - SSDM

Title

SiGe recessed source-drain (RSD) stressors for PMOS: effect of device integration flow and increased Ge content on electrical performance

Publication type

Proceedings paper

Embargo date

9999-12-31