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Demonstration of asymmetric gate-oxide thickness four-terminal FinFETs having flexible threshold voltage and good subthreshold slope
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Authors
Masahara, Meishoku
;
Surdeanu, Radu
;
Witters, Liesbeth
;
Doornbos, Gerben
;
Nguyen Hoang, Viet
;
Van den Bosch, Geert
;
Vrancken, Christa
;
Devriendt, Katia
;
Neuilly, Francois
;
Kunnen, Eddy
;
Jurczak, Gosia
;
Biesemans, Serge
Issue
3
Journal
IEEE Electron Device Letters
Volume
28
Title
Demonstration of asymmetric gate-oxide thickness four-terminal FinFETs having flexible threshold voltage and good subthreshold slope
Publication type
Journal article
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