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Analysis of the induced stresses in silicon during thermocompression Cu-Cu bonding of Cu-through-vias in 3D-SIC architecture
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Analysis of the induced stresses in silicon during thermocompression Cu-Cu bonding of Cu-through-vias in 3D-SIC architecture
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Date
2007
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Okoro, Chukwudi
;
Eneman, Geert
;
Gonzalez, Mario
;
Vandevelde, Bart
;
Swinnen, Bart
;
Stoukatch, Serguei
;
Beyne, Eric
;
Vandepitte, Dirk
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1944
since deposited on 2021-10-16
Acq. date: 2026-07-19
Citations
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Views
1944
since deposited on 2021-10-16
Acq. date: 2026-07-19
Citations