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Conference contributions
Line width dependent mobility in high-k – a comparative performance study between FUSI and TiN
Publication:
Line width dependent mobility in high-k – a comparative performance study between FUSI and TiN
Date
2007
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pantisano, Luigi
;
Trojman, Lionel
;
Severi, Simone
;
San Andres Serrano, Enrique
;
Kerner, Christoph
;
Veloso, Anabela
;
Ferain, Isabelle
;
Hoffmann, Thomas Y.
;
Groeseneken, Guido
;
De Gendt, Stefan
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1917
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1917
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations