Authors

Piontek, Andreas; Vanhoucke, T.; Van Huylenbroeck, Stefaan; Choi, Li Jen; Hurkx, G.A.M.; Hijzen, E.; Decoutere, Stefaan

Issue

1

Journal

Semiconductor Science and Technology

Volume

22

Title

Influence of lateral device scaling and airgap deep trench isolation on reliability performance of 200GHz SiGe:C HBTs

Publication type

Journal article