High-k characterization by RFCV

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Authors
San Andres Serrano, Enrique; Pantisano, Luigi; Roussel, Philippe; Toledano Luque, Maria; Trojman, Lionel; Severi, Simone; De Gendt, Stefan; Groeseneken, Guido
Conference
Physics and Technology of High-k Dielectrics
Title
High-k characterization by RFCV
Publication type
Proceedings paper
Embargo date
9999-12-31
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