Authors

Satta, Alessandra; Simoen, Eddy; Van Daele, Benny; Clarysse, Trudo; Nicholas, Gareth; Vandervorst, Wilfried; Anwand, Wolfgang; Skorupa, Wolfgang; Peaker, Tony; Marchevic, Vladimir

Conference

Proceedings International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling - INSIGHT

Title

Junction formation in Ge by ion implantation

Publication type

Proceedings paper

Embargo date

9999-12-31