Dielectric quality and reliability of FUSI/HfSiON devices with process induced strain

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Authors

Shickova, Adelina; Kaczer, Ben; Simoen, Eddy; Verheyen, Peter; Eneman, Geert; Jurczak, Gosia; Absil, Philippe; Maes, Herman; Groeseneken, Guido

Issue

9_10

Journal

Microelectronic Engineering

Volume

84

Title

Dielectric quality and reliability of FUSI/HfSiON devices with process induced strain

Publication type

Journal article

Embargo date

9999-12-31

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