Negligible effect of process-induced strain on intrinsic NBTI behavior

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Authors

Shickova, Adelina; Kaczer, Ben; Verheyen, Peter; Eneman, Geert; San Andres Serrano, Enrique; Jurczak, Gosia; Absil, Philippe; Maes, Herman; Groeseneken, Guido

Issue

3

Journal

IEEE Electron Device Letters

Volume

28

Title

Negligible effect of process-induced strain on intrinsic NBTI behavior

Publication type

Journal article

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