Authors

Singanamalla, Raghunath; Yu, HongYu; O'Sullivan, Barry; Petry, Jasmine; Mercha, Abdelkarim; Paraschiv, Vasile; Volders, Henny; Kubicek, Stefan; De Meyer, Kristin; Biesemans, Serge

Issue

9_10

Journal

Microelectronic Engineering

Volume

84

Title

Performance enhancement of Poly-Si/TiN/SiON based pMOSFETs by addition of an AlO capping layer

Publication type

Journal article