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Articles
Copper-nail TSV technology for 3D-stacked IC integration
Publication:
Copper-nail TSV technology for 3D-stacked IC integration
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Date
2007-05
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Snoeckx, Koen
;
Beyne, Eric
;
Swinnen, Bart
Journal
Solid State Technology
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1929
since deposited on 2021-10-16
Acq. date: 2025-12-16
Citations
Metrics
Views
1929
since deposited on 2021-10-16
Acq. date: 2025-12-16
Citations