Authors

Trojman, Lionel; Pantisano, Luigi; Severi, Simone; San Andres Serrano, Enrique; Hoffmann, Thomas Y.; Ferain, Isabelle; De Gendt, Stefan; Heyns, Marc; Maes, Herman; Groeseneken, Guido

Issue

9_10

Journal

Microelectronic Engineering

Volume

84

Title

Performance assessment of (110) p-FET high-k/MG: is it mobility or series resistance limited?

Publication type

Journal article