Publication:

Highly reliable Cu/ULK integratrion scheme using MHM and low-k capping film

Date

2007

Presentation

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Author(s)

Tsutsue, Makoto

;

Travaly, Youssef

;

;

;

Willegems, Myriam

;

Struyf, Herbert

;

Sinapi, Fabrice

;

Richard, Olivier

;

Kemeling, Nathan

;

De Roest, David

;

;

;

;

Metrics

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