Advanced CMOS device technologies for 45nm node and below

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Authors

Veloso, Anabela; Hoffmann, Thomas; Lauwers, Anne; Yu, HongYu; Severi, Simone; Augendre, Emmanuel; Kubicek, Stefan; Verheyen, Peter; Collaert, Nadine; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge

Issue

3

Journal

Science and Technology of Advanced Materials

Volume

8

Title

Advanced CMOS device technologies for 45nm node and below

Publication type

Journal article

Embargo date

9999-12-31

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