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Advanced electrical characterization toward (sub) 1nm EOT HfSiON – hole trapping in PFET and L-dependent effects
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1903 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-09
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Metrics
Views
1903 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-09
Citations