Publication:

Advanced electrical characterization toward (sub) 1nm EOT HfSiON – hole trapping in PFET and L-dependent effects

Date

2007
Proceedings Paper
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Author(s)

Zahid, Mohammed
;
Pantisano, Luigi
;
Degraeve, Robin  
;
Aoulaiche, Marc
;
Trojman, Lionel
;
Ferain, Isabelle
;
San Andres Serrano, Enrique
;
Groeseneken, Guido  
;
Zhang, J.F.
;
Heyns, Marc  
;
Jurczak, Gosia  
;
De Gendt, Stefan  

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