Stress analysis of Si1-xGex embedded source/drain junctions

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Authors

Bargallo Gonzalez, Mireia; Simoen, Eddy; Naka, N.; Okuno, Y; Eneman, Geert; Hikavyy, Andriy; Verheyen, Peter; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, Pierre; Thomas, S.G.; Lu, J.P; Wise, Rick

Issue

5

Journal

Materials Sicience in Semiconductor Processing

Volume

11

Title

Stress analysis of Si1-xGex embedded source/drain junctions

Publication type

Journal article

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