Authors

Bargallo Gonzalez, Mireia; Simoen, Eddy; Rosseel, Erik; Verheyen, Peter; Hoffmann, Thomas Y.; Loo, Roger; Absil, Philippe; Claeys, Cor

Conference

213th ECS Meeting

Title

Impact of millisecond laser anneal on the thermal stress-induced defect creation in Si1-xGex source/drain junctions

Publication type

Meeting abstract

Embargo date

9999-12-31