Authors
Bargallo Gonzalez, Mireia;
Simoen, Eddy;
Rosseel, Erik;
Verheyen, Peter;
Souriau, Laurent;
Geypen, Jef;
Bender, Hugo;
Hoffmann, Thomas Y.;
Loo, Roger;
Absil, Philippe;
Claeys, Cor
Conference
Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment
Title
Impact of millisecond laser anneal on the thermal stress-induced defect creation in Si1-xGex source/drain junctions
Publication type
Proceedings paper