Publication:
Impact of millisecond laser anneal on the thermal stress-induced defect creation in Si1-xGex source/drain junctions
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1917 since deposited on 2021-10-17
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Acq. date: 2026-08-06
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Statistics
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1917 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-08-06
Citations