Characterisation of the silicon nitride thin films deposited by plasmamagnetron

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Authors

Batan, A; Franquet, Alexis; Vereecken, Jean; Reniers, Francois

ISSN

0142-2421

Issue

3_4

Journal

Surface and Interface Analysis

Volume

40

Title

Characterisation of the silicon nitride thin films deposited by plasmamagnetron

Publication type

Journal article

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