Authors

Beccera, Loic; Baboux, Nicolas; Plossu, Carole; Merckling, Clement; El-Kazzi, Mario; Saint-Girons, Guillaume; Vilquin, Bertrand; Hollinger, Guy

Conference

Materials Science of High-k Dielectric Stackx - From Fundamentals to Technology

Title

Strategies for CMOS low equivalent oxide thickness achievement with high-k oxides grown on Si(001) by MBE

Publication type

Proceedings paper