Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Strategies for CMOS low equivalent oxide thickness achievement with high-k oxides grown on Si(001) by MBE
Publication:
Strategies for CMOS low equivalent oxide thickness achievement with high-k oxides grown on Si(001) by MBE
Copy permalink
Date
2008
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Beccera, Loic
;
Baboux, Nicolas
;
Plossu, Carole
;
Merckling, Clement
;
El-Kazzi, Mario
;
Saint-Girons, Guillaume
;
Vilquin, Bertrand
;
Hollinger, Guy
Journal
Abstract
Description
Statistics
Views
1972
since deposited on 2021-10-17
4
last month
Acq. date: 2026-02-25
Citations
Statistics
Views
1972
since deposited on 2021-10-17
4
last month
Acq. date: 2026-02-25
Citations