Integration issues in step and repeat UV nanoimprint lithography

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Authors
Charpin-Nicolle, C.; Chiaroni, J.; Le Cunff, Y.; Denis, H.; Rochat, N.; Villani, M. L.; Massin, J.; Irmscher, M.; Vratzov, B.; van Hossen, H.; Gubbini, P.; Lorusso, Gian; Van Den Heuvel, Dieter
Conference
34th International Conference on Micro and Nano Engineering
Title
Integration issues in step and repeat UV nanoimprint lithography
Publication type
Oral presentation
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