Publication:

Integration issues in step and repeat UV nanoimprint lithography

Date

2008
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Author(s)

Charpin-Nicolle, C.
;
Chiaroni, J.
;
Le Cunff, Y.
;
Denis, H.
;
Rochat, N.
;
Villani, M. L.
;
Massin, J.
;
Irmscher, M.
;
Vratzov, B.
;
van Hossen, H.
;
Gubbini, P.
;
Lorusso, Gian  
;
Van Den Heuvel, Dieter  

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