Advanced carrier depth profiling on Si and Ge with micro four-point probe

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Authors

Clarysse, Trudo; Eyben, Pierre; Parmentier, Brigitte; Van Daele, Benny; Satta, Alessandra; Vandervorst, Wilfried; Lin, Rong; Petersen, Dirch H.; Folmer Nielsen, Peter

ISSN

1071-1023

Issue

1

Journal

Journal of Vacuum Science and Technology B

Volume

26

Title

Advanced carrier depth profiling on Si and Ge with micro four-point probe

Publication type

Journal article

Embargo date

9999-12-31

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