Publication:
Multi-gate devices for the 32nm technology node and beyond: challenges for selective epitaxial growth
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1885 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-10-05
Citations
Statistics
Views
1885 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-10-05
Citations