Authors

Croes, Kristof; Cannata, Gianluca; Zhao, Larry; Tokei, Zsolt

ISSN

0026-2714

Issue

8_9

Journal

Microelectronics Reliability

Volume

48

Title

Study of copper drift during TDDB of intermetal dielectrics by using fully passivated MOS capacitors as test vehicle

Publication type

Journal article

Embargo date

9999-12-31