Publication:
Etch challenges brought by the metal hardmask approach for advanced contact patterning with fluorocarbon-based plasma
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1875 since deposited on 2021-10-17
1last month
Acq. date: 2026-07-18
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Statistics
Views
1875 since deposited on 2021-10-17
1last month
Acq. date: 2026-07-18
Citations