Authors

de Marneffe, Jean-Francois; Goossens, Danny; Vandervorst, Alain; Demuynck, Steven; Goethals, Mieke; Hermans, Jan; Van Roey, Frieda; Baudemprez, Bart; Brus, Stephan; Vrancken, Christa

Conference

American Vacuum Society Fall Meeting

Title

A metal hardmask approach for the contact patterning of a 0.186 μm² SRAM cell exposed with EUV lithography

Publication type

Meeting abstract

Embargo date

9999-12-31